CPC H01J 37/28 (2013.01) [H01J 37/10 (2013.01); H01J 37/20 (2013.01); H01J 37/244 (2013.01); H01J 2237/0453 (2013.01); H01J 2237/0492 (2013.01); H01J 2237/04924 (2013.01); H01J 2237/04926 (2013.01); H01J 2237/04928 (2013.01); H01J 2237/1205 (2013.01); H01J 2237/1501 (2013.01); H01J 2237/1502 (2013.01); H01J 2237/2446 (2013.01); H01J 2237/2448 (2013.01); H01J 2237/2806 (2013.01); H01J 2237/2817 (2013.01)] | 18 Claims |
1. A pre-beamlet-forming aperture array comprising:
multiple beamlet-forming apertures configured to cut off a portion of electrons of a primary electron beam emitted by an electron source to form a set of multiple electron beamlets,
wherein the pre-beamlet-forming aperture array is configured to be positioned proximate to the electron source and between the electron source and a source-conversion unit, and the source-conversion unit is configured to manipulate the set of multiple electron beamlets.
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