US 11,705,149 B2
Accelerometer inside of a microphone unit
Choon Ping Chng, Los Altos, CA (US); and Cheng-Han Wu, Mountain View, CA (US)
Assigned to Waymo LLC, Mountain View, CA (US)
Filed by WAYMO LLC, Mountain View, CA (US)
Filed on May 17, 2022, as Appl. No. 17/746,384.
Application 17/746,384 is a continuation of application No. 16/999,912, filed on Aug. 21, 2020, granted, now 11,367,458.
Prior Publication US 2022/0277762 A1, Sep. 1, 2022
Int. Cl. G10L 25/51 (2013.01); G01P 15/09 (2006.01); G10K 11/178 (2006.01); H04R 1/08 (2006.01); H04R 1/40 (2006.01); B60R 11/02 (2006.01); H04R 3/00 (2006.01); B60R 11/00 (2006.01)
CPC G10L 25/51 (2013.01) [B60R 11/02 (2013.01); G01P 15/0907 (2013.01); G10K 11/17873 (2018.01); H04R 1/08 (2013.01); H04R 1/406 (2013.01); H04R 3/005 (2013.01); B60R 2011/004 (2013.01); G10K 2210/12821 (2013.01); G10K 2210/3027 (2013.01); H04R 2499/13 (2013.01)] 16 Claims
OG exemplary drawing
 
1. A system comprising:
a microphone unit, the microphone unit comprising:
a microphone board having a first opening, a second opening, and a third opening;
a first microphone positioned over the first opening and coupled to the microphone board;
a second microphone positioned over the second opening and coupled to the microphone board;
a third microphone positioned over the third opening and coupled to the microphone board; and
an accelerometer coupled to the microphone board, wherein the accelerometer comprises:
a housing having an internal cavity;
a first electrode positioned atop a bottom surface of the internal cavity of the housing;
a piezoelectric material positioned atop the first electrode;
a second electrode positioned atop the piezoelectric material;
a mass positioned atop the second electrode; and
a spring plate positioned atop the mass; and
a processor coupled to the microphone unit.