US 11,704,929 B2
Optical structure and method of fabricating the same
Chin-Chuan Hsieh, Hsin-Chu (TW); Yueh-Ching Cheng, Hsinchu (TW); and Shih-Yu Ho, Hsinchu (TW)
Assigned to VISERA TECHNOLOGIES COMPANY LIMITED, Hsin-Chu (TW)
Filed by VisEra Technologies Company Limited, Hsin-Chu (TW)
Filed on Jul. 6, 2020, as Appl. No. 16/920,985.
Prior Publication US 2022/0004732 A1, Jan. 6, 2022
Int. Cl. G06V 40/13 (2022.01); B29D 11/00 (2006.01); H01L 27/146 (2006.01); G02B 5/18 (2006.01); G02B 19/00 (2006.01)
CPC G06V 40/1318 (2022.01) [B29D 11/0073 (2013.01); G02B 5/1809 (2013.01); G02B 19/0076 (2013.01); H01L 27/14643 (2013.01)] 16 Claims
OG exemplary drawing
 
1. An optical structure, comprising:
an optical element having a planarized top surface; and
a plurality of protrusions disposed on the planarized top surface, wherein each of the plurality of protrusions independently has a size in subwavelength dimensions,
wherein the plurality of protrusions comprise V-antennas having a V-shape from a top view, and
wherein each of the plurality of protrusions has a first side length, a second side length and a third side length from a top view, the second side length connects the first side length and the third side length, the first side length is parallel to the third side length, the second side length is the shortest distance between the first side length and the third side length, the first side length is from 40 nm to 500 nm, the second side length is from 40 nm to 500 nm, and the third side length is from 40 nm to 500 nm.