CPC G03F 7/38 (2013.01) | 20 Claims |
1. A polymer comprising:
a plurality of first cross-linkers activatable by ultraviolet (UV) exposure;
a plurality of second cross-linkers activatable by heat exposure;
a plurality of hybrid cross-linkers activatable by both UV exposure and heat exposure; and
a polymer backbone bonded to the plurality of first, second, and hybrid cross-linkers, wherein a total amount of second cross-linkers bonded to the polymer backbone is smaller than a total amount of first cross-linkers bonded to the polymer backbone.
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