US 11,703,761 B2
Temperature controlling apparatus
Chi-Hung Liao, New Taipei (TW); and Wei-Chang Cheng, Taichung (TW)
Assigned to Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu (TW)
Filed by Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu (TW)
Filed on Jul. 1, 2021, as Appl. No. 17/366,012.
Application 16/714,817 is a division of application No. 15/884,299, filed on Jan. 30, 2018, granted, now 10,509,321, issued on Dec. 17, 2019.
Application 17/366,012 is a continuation of application No. 16/869,582, filed on May 7, 2020, granted, now 11,067,891.
Application 16/869,582 is a continuation of application No. 16/714,817, filed on Dec. 16, 2019, granted, now 10,678,133, issued on Jun. 9, 2020.
Prior Publication US 2021/0333714 A1, Oct. 28, 2021
This patent is subject to a terminal disclaimer.
Int. Cl. H01L 29/739 (2006.01); H01L 29/06 (2006.01); H01L 29/66 (2006.01); G03F 7/09 (2006.01); G01K 13/02 (2021.01); H05B 3/22 (2006.01); H01L 21/3213 (2006.01); G03F 7/30 (2006.01); G03F 7/16 (2006.01); H01L 21/67 (2006.01); G03F 7/095 (2006.01); H01L 21/66 (2006.01)
CPC G03F 7/094 (2013.01) [G01K 13/02 (2013.01); G03F 7/095 (2013.01); G03F 7/16 (2013.01); G03F 7/162 (2013.01); G03F 7/30 (2013.01); H01L 21/32139 (2013.01); H01L 21/67017 (2013.01); H01L 21/67109 (2013.01); H01L 21/67248 (2013.01); H05B 3/22 (2013.01); H01L 22/12 (2013.01); H01L 22/20 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A temperature controlling apparatus, comprising:
a platen;
a first conduit comprising a first inlet, a first outlet, and a first heater, wherein a first fluid enters the first conduit from the first inlet and exits the first conduit from the first outlet, the first heater is configured to heat the first fluid to a first heating temperature, and the first fluid having the first heating temperature is dispensed on the platen through the first outlet;
a second conduit comprising a second inlet, a second outlet, and a second heater, wherein a second fluid enters the second conduit from the second inlet and exits the second conduit from the second outlet, the second heater is configured to heat the second fluid to a second heating temperature different from the first heating temperature, and the second fluid having the second heating temperature is dispensed on the platen through the second outlet;
a first outlet thermal sensor disposed at the first outlet to sense temperature of the first fluid dispensed from the first outlet; and
a second outlet thermal sensor disposed at the second outlet to sense temperature of the second fluid dispensed from the second outlet.