CPC G03F 7/094 (2013.01) [G01K 13/02 (2013.01); G03F 7/095 (2013.01); G03F 7/16 (2013.01); G03F 7/162 (2013.01); G03F 7/30 (2013.01); H01L 21/32139 (2013.01); H01L 21/67017 (2013.01); H01L 21/67109 (2013.01); H01L 21/67248 (2013.01); H05B 3/22 (2013.01); H01L 22/12 (2013.01); H01L 22/20 (2013.01)] | 20 Claims |
1. A temperature controlling apparatus, comprising:
a platen;
a first conduit comprising a first inlet, a first outlet, and a first heater, wherein a first fluid enters the first conduit from the first inlet and exits the first conduit from the first outlet, the first heater is configured to heat the first fluid to a first heating temperature, and the first fluid having the first heating temperature is dispensed on the platen through the first outlet;
a second conduit comprising a second inlet, a second outlet, and a second heater, wherein a second fluid enters the second conduit from the second inlet and exits the second conduit from the second outlet, the second heater is configured to heat the second fluid to a second heating temperature different from the first heating temperature, and the second fluid having the second heating temperature is dispensed on the platen through the second outlet;
a first outlet thermal sensor disposed at the first outlet to sense temperature of the first fluid dispensed from the first outlet; and
a second outlet thermal sensor disposed at the second outlet to sense temperature of the second fluid dispensed from the second outlet.
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