US 11,703,674 B2
Immersion objective
Alexander Epple, Aalen (DE)
Assigned to Carl Zeiss Microscopy, Jena (DE)
Filed by Carl Zeiss Microscopy GmbH, Jena (DE)
Filed on Jul. 20, 2020, as Appl. No. 16/933,735.
Claims priority of application No. 102019211179.3 (DE), filed on Jul. 26, 2019.
Prior Publication US 2021/0026124 A1, Jan. 28, 2021
Int. Cl. G02B 21/00 (2006.01); G02B 21/33 (2006.01); G02B 21/02 (2006.01)
CPC G02B 21/33 (2013.01) [G02B 21/0072 (2013.01); G02B 21/025 (2013.01)] 21 Claims
OG exemplary drawing
 
1. An objective, comprising:
a plurality of lenses arranged along an optical axis of the objective,
wherein:
the objective is an immersion objective;
the objective comprises a correction group which comprises at least one of the plurality of lenses;
the correction group is displaceable along the optical axis;
the objective has a working distance that is dependent on at least one member selected from the group consisting of an immersion medium and a cover glass that may be used;
aberrations of a wavefront coming from an axis point are describable by Zernike polynomials with Zernike coefficients;
the Zernike coefficient Z4 has a sensitivity Z4sens with respect to a displacement of the correction group along the optical axis;
the Zernike coefficient Z9 has a sensitivity Z9sens with respect to the displacement of the correction group along the optical axis; and
|Z4sens:Z9sens|<1.