US 11,703,643 B2
Integrated photonics including waveguiding material
Douglas Coolbaugh, Highland, NY (US); Thomas Adam, Slingerlands, NY (US); and Gerald L. Leake, Delmar, NY (US)
Assigned to THE RESEARCH FOUNDATION FOR THE STATE UNIVERSITY OF NEW YORK, Albany, NY (US)
Filed by The Research Foundation for the State University of New York, Albany, NY (US)
Filed on Dec. 17, 2019, as Appl. No. 16/717,737.
Application 16/717,737 is a division of application No. 14/987,710, filed on Jan. 4, 2016, granted, now 10,571,631.
Claims priority of provisional application 62/099,848, filed on Jan. 5, 2015.
Prior Publication US 2020/0158954 A1, May 21, 2020
Int. Cl. G02B 6/13 (2006.01); H01L 27/146 (2006.01); H01L 31/028 (2006.01); H01L 21/02 (2006.01); H01L 21/203 (2006.01); H01L 21/205 (2006.01); H01L 31/0232 (2014.01); H01L 31/105 (2006.01); H01L 31/0224 (2006.01); H01L 31/18 (2006.01); G02B 6/12 (2006.01); G02B 6/43 (2006.01); G02B 6/132 (2006.01); G02B 6/134 (2006.01); G02B 6/136 (2006.01)
CPC G02B 6/13 (2013.01) [G02B 6/12002 (2013.01); H01L 21/0245 (2013.01); H01L 21/0262 (2013.01); H01L 21/02381 (2013.01); H01L 21/02505 (2013.01); H01L 21/02532 (2013.01); H01L 21/02573 (2013.01); H01L 21/02639 (2013.01); H01L 21/2033 (2013.01); H01L 21/2053 (2013.01); H01L 27/14625 (2013.01); H01L 31/028 (2013.01); H01L 31/0232 (2013.01); H01L 31/02327 (2013.01); H01L 31/022408 (2013.01); H01L 31/105 (2013.01); H01L 31/1808 (2013.01); G02B 6/132 (2013.01); G02B 6/136 (2013.01); G02B 6/1347 (2013.01); G02B 6/43 (2013.01); G02B 2006/121 (2013.01); G02B 2006/12061 (2013.01); G02B 2006/12104 (2013.01); G02B 2006/12123 (2013.01); G02B 2006/12169 (2013.01); H01L 27/14629 (2013.01); Y02E 10/52 (2013.01); Y02E 10/547 (2013.01)] 21 Claims
OG exemplary drawing
 
1. A photonic structure, comprising:
a plurality of photonic layers formed on a substrate, wherein the plurality of photonic layers includes a first photonic layer and a second photonic layer;
wherein the first photonic layer and the second photonic layer are each patterned such that each of the first photonic layer and the second photonic layer defines one or more sets of photonic features; and
wherein the first photonic layer and the second photonic layer are each formed of a distinct waveguiding material and wherein the first photonic layer and the second photonic layer are at a common elevation on the substrate.