US 11,703,478 B2
Micro total analysis system, operating method and manufacturing method thereof
Xiaoxin Song, Beijing (CN); Feng Zhang, Beijing (CN); Wenqu Liu, Beijing (CN); Zhijun Lv, Beijing (CN); Liwen Dong, Beijing (CN); Zhao Cui, Beijing (CN); Detian Meng, Beijing (CN); Libo Wang, Beijing (CN); and Qi Yao, Beijing (CN)
Assigned to BOE TECHNOLOGY GROUP CO., LTD., Beijing (CN)
Appl. No. 16/957,614
Filed by BOE TECHNOLOGY GROUP CO., LTD., Beijing (CN)
PCT Filed Jul. 18, 2019, PCT No. PCT/CN2019/096511
§ 371(c)(1), (2) Date Jun. 24, 2020,
PCT Pub. No. WO2021/007844, PCT Pub. Date Jan. 21, 2021.
Prior Publication US 2023/0003688 A1, Jan. 5, 2023
Int. Cl. G01N 29/02 (2006.01)
CPC G01N 29/022 (2013.01) [G01N 2291/0228 (2013.01)] 16 Claims
OG exemplary drawing
 
1. A micro total analysis system, comprising at least one micro total analysis unit, wherein each of the at least one micro total analysis unit comprises:
a microfluidic device, comprising a first electrode and a dielectric layer connected to each other, wherein the dielectric layer is configured to drive, based on a voltage of the first electrode, a to-be-measured droplet to move; and
an acoustic wave detection device, comprising a second electrode connected to the dielectric layer, wherein the dielectric layer is further used as a transducer of the acoustic wave detection device, and is configured to generate an acoustic wave toward the to-be-measured droplet based on a voltage of the second electrode, and generate a detection result corresponding to the to-be-measured droplet based on a received acoustic wave,
wherein the micro total analysis unit further comprises a hydrophobic layer, the hydrophobic layer is on a side of the dielectric layer facing the to-be-measured droplet, and the hydrophobic layer is used for contacting the to-be-measured droplet,
wherein the hydrophobic layer comprises a through hole provided in a detection region, a third electrode connected to the dielectric layer is provided in the through hole, and the third electrode is configured to cause the acoustic wave generated by the dielectric layer to be transmitted to a part of the to-be-measured droplet, wherein the part of the to-be-measured droplet is in the detection region.