US 11,703,379 B2
Polarization independent optoelectronic device and method
Chewn-Pu Jou, Hsinchu (TW); Feng Wei Kuo, Zhudong Township (TW); Huan-Neng Chen, Taichung (TW); and Lan-Chou Cho, Hsinchu (TW)
Assigned to Taiwan Semiconductor Manufacturing Company Limited, Hsin-Chu (TW)
Filed by TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITED, Hsin-Chu (TW)
Filed on Feb. 15, 2021, as Appl. No. 17/175,961.
Application 17/175,961 is a continuation of application No. 16/207,670, filed on Dec. 3, 2018, granted, now 10,921,182.
Claims priority of provisional application 62/753,142, filed on Oct. 31, 2018.
Prior Publication US 2021/0164830 A1, Jun. 3, 2021
Int. Cl. G01J 1/04 (2006.01); G02B 6/42 (2006.01); G01J 1/42 (2006.01); G01J 1/44 (2006.01)
CPC G01J 1/0422 (2013.01) [G01J 1/0474 (2013.01); G01J 1/4228 (2013.01); G01J 1/44 (2013.01); G02B 6/4206 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A device, comprising:
a scattering structure comprising a plurality of pillars positioned over a top surface of a substrate, wherein:
the plurality of pillars are arranged to concurrently scatter incident electromagnetic radiation along a first scattering axis and along a second scattering axis,
the first scattering axis and the second scattering axis are non-orthogonal,
a first pillar of the plurality of pillars comprises:
a first member having a first horizontal cross-sectional shape; and
a second member having a second horizontal cross-sectional shape different than the first horizontal cross-sectional shape and positioned over the first member; and
a collection structure to collect the scattered electromagnetic radiation, wherein the collection structure comprises:
a first input port aligned with the first scattering axis;
a second input port aligned with the second scattering axis;
a first waveguide to guide the scattered electromagnetic radiation received at the first input port; and
a second waveguide to guide the scattered electromagnetic radiation received at the second input port, wherein the first input port and the second input port collectively collect the scattered electromagnetic radiation along a continuous region of a periphery of the scattering structure.