CPC G01C 19/5783 (2013.01) [B81B 3/0021 (2013.01); B81C 1/00444 (2013.01); G01C 19/005 (2022.01); G01C 19/5684 (2013.01); G01C 19/5691 (2013.01); H03H 3/0072 (2013.01); H03H 9/02259 (2013.01); H03H 9/2405 (2013.01); B81B 2201/0242 (2013.01); B81B 2201/0271 (2013.01); B81C 2201/0143 (2013.01); H03H 2009/02496 (2013.01)] | 19 Claims |
1. A resonating structure, comprising:
a planar support substrate;
a support post extending upward from the support substrate;
a resonating ring coaxially arranged around the support post; and
a plurality of beams extending upwardly from the resonating ring and attaching to the support post, thereby suspending the resonating ring above the support substrate, wherein the plurality of beams are defined by openings formed between adjacent beams, such that the top edge of the resonating ring member defines bottom edge of the openings, and the resonating ring and the plurality of beams form a hemi-toroidal shape.
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