US 11,703,331 B2
Three dimensional microstructures with selectively removed regions for use in gyroscopes and other devices
Khalil Najafi, Ann Arbor, MI (US); Sajal Singh, Ann Arbor, MI (US); and Jae Yoong Cho, Ann Arbor, MI (US)
Assigned to THE REGENTS OF THE UNIVERSITY OF MICHIGAN, Ann Arbor, MI (US)
Filed by THE REGENTS OF THE UNIVERSITY OF MICHIGAN, Ann Arbor, MI (US)
Filed on Mar. 18, 2021, as Appl. No. 17/205,562.
Claims priority of provisional application 62/991,338, filed on Mar. 18, 2020.
Claims priority of provisional application 62/991,390, filed on Mar. 18, 2020.
Claims priority of provisional application 62/991,419, filed on Mar. 18, 2020.
Prior Publication US 2022/0090917 A1, Mar. 24, 2022
Int. Cl. G01C 19/5783 (2012.01); G01C 19/00 (2013.01); H03H 3/007 (2006.01); G01C 19/5691 (2012.01); B81B 3/00 (2006.01); H03H 9/02 (2006.01); G01C 19/5684 (2012.01); B81C 1/00 (2006.01); H03H 9/24 (2006.01)
CPC G01C 19/5783 (2013.01) [B81B 3/0021 (2013.01); B81C 1/00444 (2013.01); G01C 19/005 (2022.01); G01C 19/5684 (2013.01); G01C 19/5691 (2013.01); H03H 3/0072 (2013.01); H03H 9/02259 (2013.01); H03H 9/2405 (2013.01); B81B 2201/0242 (2013.01); B81B 2201/0271 (2013.01); B81C 2201/0143 (2013.01); H03H 2009/02496 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A resonating structure, comprising:
a planar support substrate;
a support post extending upward from the support substrate;
a resonating ring coaxially arranged around the support post; and
a plurality of beams extending upwardly from the resonating ring and attaching to the support post, thereby suspending the resonating ring above the support substrate, wherein the plurality of beams are defined by openings formed between adjacent beams, such that the top edge of the resonating ring member defines bottom edge of the openings, and the resonating ring and the plurality of beams form a hemi-toroidal shape.