CPC F28D 20/0039 (2013.01) [F28D 20/028 (2013.01); F28F 27/02 (2013.01); F28D 2020/0069 (2013.01); F28D 2020/0078 (2013.01); F28D 2021/0077 (2013.01); H01L 21/67109 (2013.01)] | 16 Claims |
1. A temperature control system for controlling a temperature of a control target, the system comprising:
a first circulation circuit through which a first heat transfer medium circulates;
a second circulation circuit that is independent of the first circulation circuit and through which a second heat transfer medium circulates; and
a third circulation circuit that is independent of the first circulation circuit and the second circulation circuit and through which a third heat transfer medium circulates, the third heat transfer medium having a usable temperature range wider than usable temperature ranges of the first heat transfer medium and the second heat transfer medium,
wherein the first circulation circuit comprises:
a first adjustment apparatus that adjusts a temperature of the first heat transfer medium to a first temperature and discharges the temperature-adjusted first heat transfer medium;
a first flow-through path through which the first heat transfer medium flows;
a first supply path through which the first heat transfer medium supplied from the first adjustment apparatus flows to the first flow-through path; and
a first return path through which the first heat transfer medium, having flowed through the first flow-through path, flows to the first adjustment apparatus,
wherein the second circulation circuit comprises:
a second adjustment apparatus that adjusts a temperature of the second heat transfer medium to a second temperature higher than the first temperature and discharges the temperature-adjusted second heat transfer medium;
a second flow-through path through which the second heat transfer medium flows;
a second supply path through which the second heat transfer medium supplied from the second adjustment apparatus flows to the second flow-through path; and
a second return path through which the second heat transfer medium, having flowed through the second flow-through path, flows to the second adjustment apparatus,
wherein the third circulation circuit comprises:
a third flow-through path through which the third heat transfer medium flows and that exchanges heat with the first flow-through path;
a fourth flow-through path through which the third heat transfer medium flows and that exchanges heat with the second flow-through path;
a third supply path through which the third heat transfer medium flows from the third flow-through path and the fourth flow-through path to a heat exchanger that exchanges heat with the control target; and
a third return path through which the third heat transfer medium flows from the heat exchanger to the third flow-through path and the fourth flow-through path,
wherein the third circulation circuit does not comprise a tank that stores the third heat transfer medium,
wherein the temperature control system further comprises:
an adjustment section that adjusts:
an amount of the heat exchanged between the first flow-through path and the third flow-through path, and
an amount of the heat exchanged between the second flow-through path and the fourth flow-through path,
wherein the first circulation circuit further comprises:
a first heat storage through which the first heat transfer medium flows and that stores thermal energy as a result of a state change of a first heat storage material at a third temperature,
wherein the first heat transfer medium supplied from the first adjustment apparatus flows to the first flow-through path and the first heat storage through the first supply path,
wherein the first heat transfer medium, having flowed through the first flow-through path and the first heat storage, flows to the first adjustment apparatus through the first return path,
wherein the second circulation circuit further comprises:
a second heat storage through which the second heat transfer medium flows and that stores thermal energy as a result of a state change of a second heat storage material at a fourth temperature higher than the third temperature,
wherein the second heat transfer medium supplied from the second adjustment apparatus flows to the second flow-through path and the second heat storage through the second supply path, and
wherein the second heat transfer medium, having flowed through the second flow-through path and the second heat storage, flows to the second adjustment apparatus through the second return path.
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