US 11,703,244 B2
Testing apparatus
Chih-Chieh Liao, Hsinchu (TW); Yu-Min Sun, Hsinchu (TW); and Chih-Feng Cheng, Hsinchu (TW)
Assigned to Global Unichip Corporation, Hsinchu (TW); and Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu (TW)
Filed by Global Unichip Corporation, Hsinchu (TW); and Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu (TW)
Filed on Dec. 10, 2020, as Appl. No. 17/117,139.
Claims priority of application No. 109138170 (TW), filed on Nov. 3, 2020.
Prior Publication US 2022/0136724 A1, May 5, 2022
Int. Cl. G01R 31/28 (2006.01); F24F 11/48 (2018.01)
CPC F24F 11/48 (2018.01) [G01R 31/2875 (2013.01)] 17 Claims
OG exemplary drawing
 
1. A testing apparatus, comprising:
a base; and
a preheating unit arranged on the base, wherein the preheating unit comprises:
a gas generator discharging air toward the base to form an air wall;
a blocking mechanism located above the air wall and forming a heat preservation space with the air wall; and
a heating device arranged in the heat preservation space.