US 11,702,737 B2
Batch-type substrate processing apparatus and operation method thereof
Hee Seok Kim, Seongnam-Si (KR); Kyu Jin Choi, Seongnam-Si (KR); and Kang Il Lee, Yongin-Si (KR)
Assigned to EUGENE TECHNOLOGY CO., LTD.
Filed by EUGENE TECHNOLOGY CO., LTD., Yongin-Si (KR)
Filed on Jun. 22, 2020, as Appl. No. 16/908,716.
Claims priority of application No. 10-2019-0085807 (KR), filed on Jul. 16, 2019.
Prior Publication US 2021/0017644 A1, Jan. 21, 2021
Int. Cl. C23C 16/44 (2006.01); H01L 21/768 (2006.01)
CPC C23C 16/4404 (2013.01) [H01L 21/76841 (2013.01)] 9 Claims
OG exemplary drawing
 
1. A batch-type substrate processing apparatus comprising:
a vertical reaction tube having an internal space for receiving a substrate boat in which a substrate is stacked in multiple stages;
a deposition gas supply unit configured to supply a deposition gas inside the reaction tube;
a heater disposed outside the reaction tube to provide a thermal energy inside the reaction tube; and
an adhesion layer coated on an inner wall of the reaction tube and to which a deposition by-product layer by an excess deposition gas is attached.