US 11,702,691 B2
Optical detection for bio-entities
Allen Timothy Chang, Hsinchu (TW); Yi-Hsien Chang, Changhua County (TW); and Chun-Ren Cheng, Hsin-Chu (TW)
Assigned to TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., Hsin-Chu (TW)
Filed by Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu (TW)
Filed on Dec. 3, 2020, as Appl. No. 17/111,255.
Application 17/111,255 is a continuation of application No. 16/403,873, filed on May 6, 2019, granted, now 10,865,443.
Application 16/403,873 is a continuation of application No. 15/179,637, filed on Jun. 10, 2016, granted, now 10,280,456, issued on May 7, 2019.
Application 15/179,637 is a continuation of application No. 13/830,234, filed on Mar. 14, 2013, granted, now 9,366,647, issued on Jun. 14, 2016.
Prior Publication US 2021/0115507 A1, Apr. 22, 2021
This patent is subject to a terminal disclaimer.
Int. Cl. C12Q 1/6869 (2018.01); G01N 27/447 (2006.01); B01L 3/00 (2006.01); G01N 21/05 (2006.01); G01N 21/64 (2006.01); B01F 33/302 (2022.01); B01F 33/3031 (2022.01); G02B 6/122 (2006.01); G01N 21/03 (2006.01)
CPC C12Q 1/6869 (2013.01) [B01F 33/3021 (2022.01); B01F 33/3031 (2022.01); B01L 3/502707 (2013.01); B01L 3/502792 (2013.01); G01N 21/05 (2013.01); G01N 21/6428 (2013.01); G01N 27/44721 (2013.01); G01N 27/44791 (2013.01); B01L 2300/0654 (2013.01); B01L 2300/089 (2013.01); B01L 2300/0819 (2013.01); B01L 2300/0867 (2013.01); B01L 2300/165 (2013.01); B01L 2300/168 (2013.01); B01L 2400/0427 (2013.01); G01N 2021/0325 (2013.01); G01N 2021/058 (2013.01); G01N 2021/6482 (2013.01); G01N 2201/08 (2013.01); G02B 6/122 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A device comprising:
an optical signal conduit disposed on a first semiconductor substrate;
a surface treated structure disposed over the first semiconductor substrate, the surface treated structure in communication with the optical signal conduit to receive an optical signal from the optical signal conduit;
a first electrode disposed over the first semiconductor substrate;
a cap configured to form a capped area, the cap including a second electrode, wherein the optical signal conduit and the surface treated structure are disposed at least within the capped area; and
a fluidic channel, wherein a first side of the fluidic channel is formed on the first semiconductor substrate and a second side of the fluidic channel is formed on the cap, the cap being coupled to the first semiconductor substrate, and wherein movement of fluid through the fluidic channel is controlled by electric fields associated with the first and second electrodes.