CPC C02F 1/444 (2013.01) [B01D 61/18 (2013.01); B01D 61/22 (2013.01); B01D 63/02 (2013.01); B01D 2311/25 (2013.01); B01D 2313/50 (2013.01); C02F 2103/04 (2013.01); C02F 2209/03 (2013.01); C02F 2301/046 (2013.01)] | 6 Claims |
1. A method of treating water, comprising:
receiving a flow of ultrapure water (UPW) directed toward a recirculation pump from a source of UPW;
setting the speed of the recirculation pump to a predetermined constant speed;
directing a fluid including the UPW to an inlet of an ultrafiltration (UF) module;
recirculating at least a portion of permeate from a permeate outlet of the UF module to the inlet using the recirculation pump and a recirculation conduit;
providing a valve arrangement actuable from a closed to an open condition for effecting a pressurized flow of permeate to the recirculation pump;
measuring a pressure of the permeate at a position that is upstream from the valve arrangement and downstream from the permeate outlet;
comparing the measured pressure of the permeate to a predetermined value; and
responsive to the comparison, actuating the valve arrangement.
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