US 11,702,351 B2
Method and system for treating ultrapure water
Boris Eliosov, St. Marys, PA (US); Glen P. Sundstrom, Rockford, IL (US); and Bruce L. Coulter, Rockford, IL (US)
Assigned to Evoqua Water Technologies LLC, Pittsburgh, PA (US)
Filed by Evoqua Water Technologies LLC, Pittsburgh, PA (US)
Filed on Jun. 21, 2021, as Appl. No. 17/353,735.
Application 17/353,735 is a division of application No. 16/333,280, granted, now 11,072,545, previously published as PCT/US2017/051763, filed on Sep. 15, 2017.
Claims priority of provisional application 62/435,119, filed on Dec. 16, 2016.
Claims priority of provisional application 62/394,788, filed on Sep. 15, 2016.
Prior Publication US 2021/0323843 A1, Oct. 21, 2021
Int. Cl. C02F 1/44 (2023.01); B01D 61/18 (2006.01); B01D 61/22 (2006.01); B01D 63/02 (2006.01); C02F 103/04 (2006.01)
CPC C02F 1/444 (2013.01) [B01D 61/18 (2013.01); B01D 61/22 (2013.01); B01D 63/02 (2013.01); B01D 2311/25 (2013.01); B01D 2313/50 (2013.01); C02F 2103/04 (2013.01); C02F 2209/03 (2013.01); C02F 2301/046 (2013.01)] 6 Claims
OG exemplary drawing
 
1. A method of treating water, comprising:
receiving a flow of ultrapure water (UPW) directed toward a recirculation pump from a source of UPW;
setting the speed of the recirculation pump to a predetermined constant speed;
directing a fluid including the UPW to an inlet of an ultrafiltration (UF) module;
recirculating at least a portion of permeate from a permeate outlet of the UF module to the inlet using the recirculation pump and a recirculation conduit;
providing a valve arrangement actuable from a closed to an open condition for effecting a pressurized flow of permeate to the recirculation pump;
measuring a pressure of the permeate at a position that is upstream from the valve arrangement and downstream from the permeate outlet;
comparing the measured pressure of the permeate to a predetermined value; and
responsive to the comparison, actuating the valve arrangement.