US 11,702,273 B2
Storage container and supply system
Chia Jen Tung, Hefei (CN)
Assigned to CHANGXIN MEMORY TECHNOLOGIES, INC., Hefei (CN)
Filed by CHANGXIN MEMORY TECHNOLOGIES, INC., Hefei (CN)
Filed on Jul. 30, 2021, as Appl. No. 17/444,182.
Application 17/444,182 is a continuation of application No. PCT/CN2021/079809, filed on Mar. 9, 2021.
Claims priority of application No. 202010218909.X (CN), filed on Mar. 25, 2020.
Prior Publication US 2021/0354904 A1, Nov. 18, 2021
Int. Cl. B65D 83/00 (2006.01); B67D 3/00 (2006.01)
CPC B65D 83/0005 (2013.01) [B67D 3/0003 (2013.01)] 16 Claims
OG exemplary drawing
 
1. A storage container for accommodating and removing a photoresist, comprising:
a sidewall portion, a seal portion and a movable member, the sidewall portion, the seal portion and the movable member defining an accommodation space;
the seal portion being adapted to seal a top of the sidewall portion, and the seal portion being provided with a hole communicated with the accommodation space, the hole being configured to connect a liquid inlet end of a liquid outlet conduit;
the movable member being adapted to seal a bottom of the sidewall portion, and further adapted to move up and down in parallel to a direction of the bottom of the sidewall portion pointing to the top; and
the movable member being configured to connect a control device, the control device controlling the movable member to move up and down in the direction of the bottom of the sidewall portion pointing to the top, so as to discharge the photoresist in the accommodation space through the hole;
wherein the movable member comprises a sealing portion and a support rod;
the sealing portion or the support rod is configured to connect the control device, the sealing portion is movably arranged on the support rod, and the control device is configured to control the sealing portion to move up and down in the direction of the bottom of the sidewall portion pointing to the top; and
a surface of the sealing portion is provided with a film layer covering the support rod in the accommodation space.