US 11,701,599 B2
Control method for rectification and purification system of electronic-grade chlorine trifluoride
Xiang Ru Li, Longyan (CN); Jia Lei Li, Longyan (CN); Shi Hua Chen, Longyan (CN); Li Ming Shen, Longyan (CN); Rui Jie Yu, Longyan (CN); and Qiang Wu, Longyan (CN)
Assigned to FUJIAN DEER TECHNOLOGY CO., LTD., Longyan (CN)
Appl. No. 17/787,336
Filed by FUJIAN DEER TECHNOLOGY CO., LTD., Longyan (CN)
PCT Filed Oct. 28, 2021, PCT No. PCT/CN2021/126903
§ 371(c)(1), (2) Date Jun. 20, 2022,
PCT Pub. No. WO2022/160820, PCT Pub. Date Aug. 4, 2022.
Claims priority of application No. 202110127961.9 (CN), filed on Jan. 29, 2021.
Prior Publication US 2023/0138541 A1, May 4, 2023
Int. Cl. B01D 3/14 (2006.01); B01D 3/42 (2006.01); B01D 3/32 (2006.01)
CPC B01D 3/143 (2013.01) [B01D 3/322 (2013.01); B01D 3/42 (2013.01)] 2 Claims
 
1. A rectification method for a rectification device of electronic-grade chlorine trifluoride, comprising a rectification device of electronic-grade chlorine trifluoride which comprises a two-stage cryogenic rectification device, wherein an extraction agent is arranged in the two-stage cryogenic rectification device and configured for dissociating associated molecules of hydrogen fluoride and chlorine trifluoride; and the extraction agent is fluoroether oil, a mass ratio of a stationary liquid to a stationary phase in the fluoroether oil is 0.3-0.5:1, and the stationary liquid is YLVACO6/16, wherein the two-stage cryogenic rectification device comprises a low-boiling column, and the low-boiling column comprises a first reboiler, a first low-boiling column packing section, a second low-boiling column packing section, and a first condenser in sequence from bottom to top; the two-stage cryogenic rectification device comprises a high-boiling column, and the high-boiling column comprises a second reboiler, a first high-boiling column packing section, a second high-boiling column packing section, a third high-boiling column packing section, and a second condenser in sequence from bottom to top, characterized by comprising the following steps:
S1, controlling a temperature of a second-layer column plate at an upper end of the first reboiler to be 10° C. to 12° C., and a temperature of a second-layer column plate at a lower end of the first condenser to be −22.5° C. to 24° C.; wherein the temperature of the column plate can be controlled by temperatures of a hot end and a cold end;
S2, controlling a temperature of an upper end of the second reboiler to be 11° C. to 12° C., and a temperature of a lower end of the second condenser to be −6° C. to −4° C.; wherein the temperature of the column plate can be controlled by the temperatures of the hot end and the cold end.