| US 7,564,176 B2 | ||
| Laminated piezoelectric element and production method of the same | ||
| Hideya Sakamoto, Tokyo (Japan); Keisuke Itakura, Tokyo (Japan); and Norimasa Sakamoto, Tokyo (Japan) | ||
| Assigned to TDK Corporation, Tokyo (Japan) | ||
| Filed on Mar. 09, 2007, as Appl. No. 11/684,275. | ||
| Claims priority of application No. 2006-078130 (JP), filed on Mar. 22, 2006. | ||
| Prior Publication US 2007/0222340 A1, Sep. 27, 2007 | ||
| Int. Cl. H01L 41/187 (2006.01) | ||
| U.S. Cl. 310—358 [310/328] | 11 Claims |
| 1. A laminated piezoelectric element comprising:
a plurality of piezoelectric layers each comprising a composite oxide as a main constituent thereof; and
a plurality of internal electrode layers formed between the piezoelectric layers and comprising Ag; wherein:
the piezoelectric layers are each comprised of a sintered body comprising:
the composite oxide, as a main constituent thereof, represented by (Pba-bMb) [(Zn1/3Nb2/3)xTiyZrz]O3 with the proviso that 0.96≤a≤1.03, 0≤b≤0.1, 0.05≤x≤0.15, 0.25≤y≤0.5, 0.35≤z≤0.6, x+y+z=1, and M represents at least one selected
from Sr, Ca and Ba;
Ag in a content of 1.0% by weight or less, not inclusive of 0, in terms of Ag2O in relation to the main constituent; and
Ta in a content of 0.7% by weight or less, not inclusive of 0, in terms of Ta2O5 in relation to the main constituent.
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