US 7,564,043 B2
MCP unit, MCP detector and time of flight mass spectrometer
Masahiro Hayashi, Hamamatsu (Japan); Yuuya Washiyama, Hamamatsu (Japan); Akio Suzuki, Hamamatsu (Japan); and Masahiko Iguchi, Hamamatsu (Japan)
Assigned to Hamamatsu Photonics K.K., Hamamatsu-shi, Shizuoka (Japan)
Filed on May 24, 2007, as Appl. No. 11/802,771.
Prior Publication US 2008/0290267 A1, Nov. 27, 2008
Int. Cl. H01J 37/252 (2006.01)
U.S. Cl. 250—397  [250/287] 12 Claims
OG exemplary drawing
 
1. An MCP unit comprising:
a micro-channel plate, for releasing secondary electrons internally multiplied in response to incidence of charged particles, arranged on a plane that intersects a predetermined reference axis, said micro-channel plate having an incident surface upon which the charged particles are incident, and an exit surface that opposes the incident surface and emits the secondary electrons;
a first electrode being in contact with the incident surface of said micro-channel plate, said first electrode being set to a predetermined potential;
a second electrode being in contact with the exit surface of said micro-channel plate, said second electrode being set higher in potential than said first electrode;
an anode arranged in a position where the secondary electrons released from the exit surface of said micro-channel plate reach, in a state to intersect the reference axis, said anode being set higher in potential than said second electrode; and
an acceleration electrode arranged between said micro-channel plate and said anode such that a shortest distance to said anode is longer than a shortest distance to the exit surface of said micro-channel plate, said acceleration electrode being set higher in potential than said second electrode and having a plurality of openings which permit passing of the secondary electrons migrating from the exit surface of said micro-channel plate toward said anode.