| US 7,563,042 B2 | ||
| Substrate carrying apparatus, substrate carrying method, and coating and developing apparatus | ||
| Masahiro Nakaharada, Koshi (Japan); Seiki Ishida, Koshi (Japan); Taro Yamamoto, Koshi (Japan); and Katsuhiro Morikawa, Koshi (Japan) | ||
| Assigned to Tokyo Electron Limited, Tokyo (Japan) | ||
| Filed on Aug. 16, 2006, as Appl. No. 11/504,785. | ||
| Claims priority of application No. 2005-254158 (JP), filed on Sep. 01, 2005. | ||
| Prior Publication US 2007/0195297 A1, Aug. 23, 2007 | ||
| Int. Cl. G03D 5/00 (2006.01); G03B 27/52 (2006.01); C23C 16/18 (2006.01) | ||
| U.S. Cl. 396—611 [355/27; 118/728; 414/941] | 13 Claims |
| 1. A substrate carrying apparatus for carrying a substrate, on which a liquid remains, the substrate carrying apparatus comprising:
an arm body;
a plurality of supporting portions provided in the arm body and adapted to support the rear face of the substrate;
a one-side restricting portion for controlling one side of the periphery of the substrate, and an other-side restricting portion
for controlling the other side of the periphery of the substrate, these restricting portions being provided in the arm body
to face each other; and
liquid receivers positioned inside each of the restricting portions of the arm body.
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