| US 7,560,705 B2 | ||
| Workpiece handling scan arm for ion implantation system | ||
| Ari Eiriksson, Beverly, Mass. (US); Donovan Beckel, Wakefield, Mass. (US); Robert Mitchell, Winchester, Mass. (US); Michel Pharand, San Jose, Calif. (US); Marvin LaFontaine, Kingston, N.H. (US); Ashwin Purohit, Gloucester, Mass. (US); Steven Weed, Marblehead, Mass. (US); Wayne Arseneault, Lynnfield, Mass. (US); Shantanu Pathak, Nutley, N.J. (US); and Joseph Daniel Foley, Swampscott, Mass. (US) | ||
| Assigned to Axcelis Technologies, Inc., Beverly, Mass. (US) | ||
| Filed on Aug. 17, 2007, as Appl. No. 11/840,888. | ||
| Claims priority of provisional application 60/838407, filed on Aug. 17, 2006. | ||
| Prior Publication US 2008/0105836 A1, May 08, 2008 | ||
| Int. Cl. H01J 37/317 (2006.01) | ||
| U.S. Cl. 250—442.11 [250/492.21] | 22 Claims |
| 1. A rotational end effector for a scan arm, the rotational end effector comprising:
an electrostatic chuck comprising a first mounting member, wherein the first mounting member has one or more first electrical
connectors and one or more first fluid channels associated therewith;
a twist head, wherein the twist head is configured to selectively rotate the electrostatic chuck about a twist axis, the twist
head comprising:
a generally fixed enclosure; and
a rotatable shaft rotatably coupled to the enclosure, wherein the rotatable shaft comprises a second mounting member, and
wherein the rotatable shaft has one or more second electrical connectors and one or more second fluid channels associated
therewith; and
a clamping member, wherein the clamping member is configured to selectively couple the first mounting member of the electrostatic
chuck to the second mounting member of the rotatable shaft, wherein the one or more first electrical connectors and the one
or more first fluid channels of the electrostatic chuck are selectively connected to the respective one or more second electrical
connectors and one or more second fluid channels of the rotatable shaft by the clamping member.
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