| US 7,557,933 B2 | ||
| Measuring probe, sample surface measuring apparatus and sample surface measuring method | ||
| Kenji Fukuzawa, Nagoya (Japan); Mitsuhiro Shikita, Nagoya (Japan); and Satoshi Terada, Nagoya (Japan) | ||
| Assigned to Japan Science and Technology Agency, Kawaguchi-shi, Saitama (Japan) | ||
| Appl. No. 12/279,331 PCT Filed Feb. 14, 2007, PCT No. PCT/JP2007/052626 § 371(c)(1), (2), (4) Date Aug. 13, 2008, PCT Pub. No. WO2007/094365, PCT Pub. Date Aug. 23, 2007. |
||
| Claims priority of application No. 2006-037030 (JP), filed on Feb. 14, 2006. | ||
| Prior Publication US 2009/0027690 A1, Jan. 29, 2009 | ||
| Int. Cl. G01B 11/30 (2006.01) | ||
| U.S. Cl. 356—600 [356/601; 356/445; 33/559; 33/556; 33/558.01; 33/558.04] | 16 Claims |
| 1. A measurement probe for measuring surface of a sample, comprising:
a base section;
a head section having a probe tip for measuring the surface; and
a support structure section which supports the head section with the base section along a first axis as a support axis substantially
orthogonal to a probe tip axis in the direction of protrusion of the probe tip,
wherein the support structure section includes two spring structure sections of a first spring structure section which is
deformable in the direction of the probe tip axis, and a second spring structure section which is deformable in the direction
of a second axis substantially orthogonal to the probe tip axis and the first axis, and
wherein the head section has a reflection surface which is provided at the side opposite to the probe tip and formed with
a reflection pattern, varying the reflectance so as to include different reflectance values within the surface.
|