| US 7,557,414 B2 | ||
| Semiconductor device and method for manufacturing the same | ||
| Ken Suzuki, Osaka (Japan); and Masafumi Tsutsui, Shiga (Japan) | ||
| Assigned to Panasonic Corporation, Osaka (Japan) | ||
| Filed on Jun. 20, 2006, as Appl. No. 11/455,649. | ||
| Claims priority of application No. 2005-310244 (JP), filed on Oct. 25, 2005. | ||
| Prior Publication US 2007/0090465 A1, Apr. 26, 2007 | ||
| Int. Cl. H01L 29/94 (2006.01) | ||
| U.S. Cl. 257—369 [257/355; 257/329; 257/135; 257/E21.371; 257/E21.387; 257/E21.441; 257/E21.452; 257/E21.403; 257/E21.407; 257/E21.445] | 15 Claims |

| 1. A semiconductor device, comprising:
a semiconductor substrate;
an element isolation;
a first MIS transistor on the semiconductor substrate; and
an insulating film which has tensile stress and which is formed on the semiconductor substrate so as to cover the first MIS
transistor,
wherein the first MIS transistor includes:
a p-type semiconductor layer defined by the element isolation in the semiconductor substrate;
a first gate insulating film formed on the p-type semiconductor layer;
a first gate electrode formed on the first gate insulating film, the first gate electrode having a first portion disposed
on the p-type semiconductor layer and a second portion disposed on the element isolation so as to lie astride the p-type semiconductor
layer;
a first sidewall insulating film formed at each side face of the second portion of the first gate electrode on the element
isolation and including at least a first sidewall;
an n-type extension diffusion layer formed outwards from the first portion of the first gate electrode in the p-type semiconductor
layer; and
an n-type impurity diffusion layer formed in a region of the p-type semiconductor layer which is adjacent to the n-type extension
diffusion layer, wherein
the first sidewall insulating film is not formed at each side face of the first portion of the first gate electrode on the
p-type semiconductor layer.
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