US 7,557,404 B2
Nonvolatile memory devices and methods of forming the same
Kwang-Wook Koh, Seoul (Korea, Republic of); and Hee-Seog Jeon, Suwon-si (Korea, Republic of)
Assigned to Samsung Electronics Co., Ltd., (Korea, Republic of)
Filed on Feb. 08, 2007, as Appl. No. 11/704,003.
Claims priority of application No. 10-2006-0012710 (KR), filed on Feb. 09, 2006.
Prior Publication US 2007/0194369 A1, Aug. 23, 2007
Int. Cl. H01L 29/788 (2006.01)
U.S. Cl. 257—315  [257/324; 257/E29.129] 12 Claims
OG exemplary drawing
 
1. A nonvolatile memory device comprising:
a semiconductor substrate having a device isolation layer defining an active region;
a pair of nonvolatile memory transistors on the active region;
a select transistor disposed between the pair of nonvolatile memory transistors; and
floating diffusion regions on the active region between each of the nonvolatile memory transistors and the select transistor,
wherein the select transistor includes a gate insulation layer having a thickness and a material that are the same as those of gate insulation layers of the nonvolatile memory transistors.