| US 7,557,364 B2 | ||
| Charge neutralizing device | ||
| Hiroyuki Ito, Chiba (Japan); Noriyuki Sakudo, Ishikawa (Japan); Yuichiro Sasaki, Osaka (Japan); and Bunji Mizuno, Nara (Japan) | ||
| Assigned to Panasonic Corporation, Osaka (Japan) | ||
| Appl. No. 11/597,324 PCT Filed May 24, 2005, PCT No. PCT/JP2005/009460 § 371(c)(1), (2), (4) Date Nov. 22, 2006, PCT Pub. No. WO2005/117059, PCT Pub. Date Dec. 08, 2005. |
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| Claims priority of application No. 2004-183112 (JP), filed on May 25, 2004. | ||
| Prior Publication US 2007/0228294 A1, Oct. 04, 2007 | ||
| Int. Cl. G21K 5/00 (2006.01); H01J 7/24 (2006.01) | ||
| U.S. Cl. 250—492.21 [250/492.22; 250/492.3; 315/111.21; 315/111.71; 315/111.81] | 22 Claims |
| 1. A charge neutralizing device, comprising:
a microwave generating unit;
a plasma generating unit that generates an electron plasma by using a microwave generated from the microwave generating unit;
and
a contact unit that brings the electron plasma generated from the plasma generating unit into contact with a beam plasma region
including an ion beam through a plasma tube which surrounds the ion beam.
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