| US 7,394,546 B2 | ||
| Method and apparatus for full phase interferometry | ||
| Andrei B. Vakhtin, Los Alamos, N. Mex. (US); Daniel J. Kane, Santa Fe, N. Mex. (US); and Kristen A. Peterson, Santa Fe, N. Mex. (US) | ||
| Assigned to Southwest Sciences Incorporated, Santa Fe, N. Mex. (US) | ||
| Filed on May 22, 2006, as Appl. No. 11/438,864. | ||
| Claims priority of provisional application 60/683920, filed on May 23, 2005. | ||
| Claims priority of provisional application 60/784574, filed on Mar. 21, 2006. | ||
| Prior Publication US 2006/0290939 A1, Dec. 28, 2006 | ||
| Int. Cl. G01B 9/02 (2006.01); G01J 3/45 (2006.01) | ||
| U.S. Cl. 356—456 | 26 Claims |
| 1. An apparatus for interferometry, said apparatus comprising:
an interferometer comprising a light source and an element providing a dithered phase shift between target and reference arms
of said interferometer;
a detector detecting an output from said interferometer; and
one or more processors receiving input from said detector and demodulating at different multiples of the dither frequency
of said element and further processing to create more than one real-valued interferograms, from said demodulations.
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