| US 7,394,532 B2 | ||
| Surface inspection method and apparatus | ||
| Hisashi Isozaki, Tokyo (Japan); Michihiro Yamazaki, Tokyo (Japan); Hiroshi Yoshikawa, Tokyo (Japan); Takehiro Takase, Tokyo (Japan); Yutaka Shida, Tokyo (Japan); and Yoichiro Iwa, Tokyo (Japan) | ||
| Assigned to Kabushiki Kaisha Topcon, Tokyo (Japan) | ||
| Filed on Oct. 08, 2003, as Appl. No. 10/680,432. | ||
| Claims priority of application No. 2002-295613 (JP), filed on Oct. 09, 2002. | ||
| Prior Publication US 2004/0130727 A1, Jul. 08, 2004 | ||
| Int. Cl. G01N 21/00 (2006.01); G01B 11/28 (2006.01) | ||
| U.S. Cl. 356—237.2 [356/630] | 11 Claims |
| 1. A surface inspection method for inspecting a plurality of inspection subjects having films coated thereon, comprising the
steps of:
storing inspection data regarding an inspection apparatus and film parameters regarding the films coated on the inspection
subjects, by associating with each other, so as to obtain predetermined inspection conditions;
wherein the inspection conditions are the wavelength of a laser, an incident angle, and a polarization, and
automatically setting a wavelength of a laser, an incident angle, and a polarization as the predetermined inspection conditions
for the inspection apparatus by selecting the film parameters of the inspection subjects to be measured in the inspection
apparatus by an operator, when performing each measurement,
wherein the inspection subjects to be measured are in a manufacturing line,
wherein the films coated on the inspection subjects to be measured vary in thickness from one inspection subject to another,
and two or more kinds of laser which emit luminance flux having different wavelengths to each other are switched or mixed
to make a laser incident on the film-coated inspection subjects at a same incident angle.
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