| US 7,393,135 B2 | ||
| Moisture detection device | ||
| Yoshiyuki Kanai, Tokyo (Japan); Kazumasa Ibata, Tokyo (Japan); Shigeki Shoji, Tokyo (Japan); Masaki Takechi, Tokyo (Japan); Shingo Masumoto, Tokyo (Japan); and Toshio Kurihara, Tokyo (Japan) | ||
| Assigned to Yamatake Corporation, Tokyo (Japan) | ||
| Appl. No. 10/593,907 PCT Filed Mar. 16, 2005, PCT No. PCT/JP2005/004648 § 371(c)(1), (2), (4) Date Sep. 20, 2006, PCT Pub. No. WO2005/098403, PCT Pub. Date Oct. 20, 2005. |
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| Claims priority of application No. 2004-101415 (JP), filed on Mar. 30, 2004. | ||
| Prior Publication US 2007/0211781 A1, Sep. 13, 2007 | ||
| Int. Cl. G01N 25/02 (2006.01) | ||
| U.S. Cl. 374—19 [73/29.01; 73/29.02] | 6 Claims |
| 1. A moisture detection device comprising:
a mirror whose mirror surface is exposed to a gas to be measured;
a plurality of minute projections are formed at a predetermined interval on the mirror surface of said mirror;
cooling means for cooling said mirror;
light-emitting means for applying light to the mirror surface;
light-receiving means for receiving reflected light of light applied from said light-emitting means to the mirror surface;
and means for detecting moisture which is produced on the mirror surface of said mirror which is cooled by said cooling means
on the basis of the reflected light received by said light-receiving means.
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