US RE42,491 E1
Multilayer hard coating for tools
Volker Derflinger, Feldkirch (Austria)
Assigned to Oerlikon Trading AG, Trubbach, Trubbach (Switzerland)
Filed on Aug. 25, 2010, as Appl. No. 12/862,953.
Application 12/570392 is a continuation of application No. 12/027534, filed on Feb. 07, 2008, granted, now 7,618,720, filed on Nov. 17, 2009.
Application 12/027534 is a continuation of application No. 11/178818, filed on Jul. 11, 2005, granted, now 7,348,074, filed on Mar. 25, 2008.
Application 12/862953 is a reissue of application No. 12/570392, filed on Sep. 30, 2009, now 7,718,043, filed on May 18, 2010.
Claims priority of application No. 59805 (CH), filed on Apr. 01, 2005.
Int. Cl. C23C 14/00 (2006.01)
U.S. Cl. 204—192.12  [204/192.15; 204/192.16; 204/192.38] 25 Claims
OG exemplary drawing
 
1. A method of providing a hard coating on a workpiece, comprising:
a) positioning the workpiece in a coating system adjacent at least one TiSiX [ TiSi ] target and at least one AlCrX [ AlCr ] target, each of said targets having an associated cathodic arc source , wherein X is selected from the group consisting of N, C, B, CN, BN, CBN, NO, CO, BO, CNO, BNO, and CBNO;
b) rotating the workpiece;
c) applying a biasing voltage to said workpiece; and
d) selective operating said cathodic arc sources to deposit a multilayer coating onto the workpiece, said multilayer coating comprising:
at least one layer selected from the group consisting of:
an (AlyCr1-y)X layer, wherein 0.2≤y≤0.7 and X is selected from the group consisting of N, C, B, CN, BN, CBN, NO, CO, BO, CNO, BNO, and CBNO, and a (TizSi1-z)X layer, wherein 0.99≧z≧0.7, and
at least one layer stack comprising the following layers:
one (AlCrTiSi)X mixed layer
followed by another (TizSi1-z)X layer
followed by another (AlCrTiSi)X mixed layer
followed by another (AlyCr1-y)X layer,
wherein X, y and z are as previously defined.