| US 7,554,350 B2 | ||
| Burn-in system with heating blocks accommodated in cooling blocks | ||
| Kazunari Suga, Tokyo (Japan); Toru Honobe, Tokyo (Japan); Seigo Matsunaga, Tokyo (Japan); and Kazumi Kita, Tokyo (Japan) | ||
| Assigned to Advantest Corporation, Tokyo (Japan) | ||
| Filed on May 07, 2008, as Appl. No. 12/116,599. | ||
| Application 12/116599 is a division of application No. 11/226408, filed on Sep. 15, 2005, granted, now 7,397,258. | ||
| Prior Publication US 2008/0238465 A1, Oct. 02, 2008 | ||
| Int. Cl. G01R 31/26 (2006.01) | ||
| U.S. Cl. 324—760 [324/765] | 17 Claims |
| 1. A burn-in system for conducting a burn-in test on a plurality of devices under test mounted on a burn-in board, comprising:
heating blocks having heating device configured to heat the devices; and
cooling blocks formed with channels able to carry a coolant for cooling the devices under test, wherein
each of the cooling blocks is formed with a first accommodating space for accommodating one heating block,
each of the heating blocks is accommodated in corresponding the first accommodating space with a layer of air formed between
the heating block and the cooling block so as to be insulated from the cooling block,
the each heating block is supported and mechanically floating with respect to the cooling block,
a front end face of the heating block and a front end face of the cooling block are able to come in directly contact with
the device under test, and
when the heating block is not in contact with a device under test, the front end face of the heating block sticks out relative
to the front end face of the cooling block.
|