| US 7,554,334 B2 | ||
| Matching network characterization using variable impedance analysis | ||
| Steven C. Shannon, San Mateo, Calif. (US); Daniel J. Hoffman, Saratoga, Calif. (US); Steven Lane, San Jose, Calif. (US); Walter R. Merry, Sunnyvale, Calif. (US); and Jivko Dinev, Cupertino, Calif. (US) | ||
| Assigned to Applied Marterials, Inc., Santa Clara, Calif. (US) | ||
| Filed on Sep. 28, 2006, as Appl. No. 11/536,197. | ||
| Prior Publication US 2008/0087381 A1, Apr. 17, 2008 | ||
| Int. Cl. G01R 31/02 (2006.01) | ||
| U.S. Cl. 324—535 [324/600; 333/32] | 19 Claims |
| 1. A method for characterizing a matching network, comprising:
connecting the matching network to a load;
measuring an output of the matching network over a range of load impedances to obtain a plurality of measured outputs; and
calculating the equivalent series resistance of the matching network based upon a relationship between the plurality of measured
outputs and a corresponding plurality of load resistance resistances over the range of load impedances.
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