US 7,553,905 B2
	Anti-reflective coatings
David J. Abdallah, Bernardsville, N.J. (US); Jian Yin, Bridgewater, N.J. (US); and Mark O. Neisser, Whitehouse Station, N.J. (US)
Assigned to AZ Electronic Materials USA Corp., Somerville, N.J. (US)
Filed on Oct. 31, 2005, as Appl. No. 11/262,639.
Prior Publication US 2007/0099108 A1, May 03, 2007
Int. Cl. G03F 7/11 (2006.01); C08K 5/07 (2006.01)

U.S. Cl. 525—154  [430/271.1; 438/952]

4 Claims

1. A polymer consisting of the reaction product between poly(hydroxyethyl methacrylate-co-benzyl methacrylate) and N,N,N,N-tetra(methoxymethyl)glycoluril, wherein the polymer is capable of self-crosslinking under acidic conditions.