| US 7,553,334 B2 | ||
| Defective product inspection apparatus, probe positioning method and probe moving method | ||
| Eiichi Hazaki, Tsuchiura (Japan); Yasuhiro Mitsui, Fuchu (Japan); Takashi Furukawa, Sagamihara (Japan); Hiroshi Yanagita, Koganei (Japan); Susumu Kato, Hitachinaka (Japan); Osamu Satou, Hitachinaka (Japan); Osamu Yamada, Hitachinaka (Japan); and Yoshikazu Inada, Hitachinaka (Japan) | ||
| Assigned to Hitachi High-Technologies Corporation, Tokyo (Japan) | ||
| Filed on Oct. 23, 2007, as Appl. No. 11/976,238. | ||
| Application 11/976238 is a continuation of application No. 11/002710, filed on Dec. 03, 2004, granted, now 7,297,945. | ||
| Claims priority of application No. 2003-406707 (JP), filed on Dec. 05, 2003. | ||
| Prior Publication US 2008/0048699 A1, Feb. 28, 2008 | ||
| Int. Cl. G01N 13/10 (2006.01) | ||
| U.S. Cl. 850—8 [850/9; 250/306; 250/310] | 9 Claims |
| 1. A defective product inspection apparatus for inspecting a product as a specimen, comprising:
a stage for holding the specimen thereon;
a specimen chamber for containing the stage therein;
a probe contactable to the specimen in the specimen chamber;
a probe holder for holding the probe thereon;
a probe exchange chamber for containing the probe holder therein;
a gate valve for connecting the specimen chamber and the probe exchange chamber to each other;
an exhauster for exhausting air from the specimen chamber and the probe exchange chamber; and
an electronic optical device for projecting a charged particle beam to the specimen,
wherein the probe holder is movable on the stage and the stage is movable between a first position in the vicinity of the
electronic optical device and a second position in the vicinity of the probe exchange chamber in the specimen chamber.
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