US 7,553,165 B2
Spring interconnect structures
Gaetan L. Mathieu, Livermore, Calif. (US); Benjamin N. Eldridge, Danville, Calif. (US); Gary W. Grube, Pleasanton, Calif. (US); and Richard A. Larder, Livermore, Calif. (US)
Assigned to FormFactor, Inc., Livermore, Calif. (US)
Filed on May 13, 2008, as Appl. No. 12/120,112.
Application 12/120112 is a division of application No. 10/750355, filed on Dec. 29, 2003, granted, now 7,371,072, filed on May 13, 2008.
Application 10/750355 is a continuation of application No. 09/474788, filed on Dec. 29, 1999, granted, now 6,672,875, filed on Jan. 06, 2004.
Application 09/474788 is a continuation in part of application No. 09/205023, filed on Dec. 02, 1998, granted, now 6,255,126, filed on Jul. 03, 2001.
Application 09/205023 is a continuation in part of application No. 09/205022, filed on Dec. 02, 1998, granted, now 6,268,015, filed on Jul. 31, 2001.
Prior Publication US 2008/0254651 A1, Oct. 16, 2008
Int. Cl. H01R 12/00 (2006.01)
U.S. Cl. 439—66 18 Claims
OG exemplary drawing
 
1. An interconnection element comprising:
a post coupled at a first end to a surface of a substrate, the post extending away from the substrate to a second end of the post;
a beam structure comprising:
a body coupled to the second end of the post, and
a plurality of leaf portions extending from the body to distal ends of the leaf portions, each of the leaf portions being generally parallel to the surface of the substrate, there being a space between all adjacent leaf portions from the body to the distal ends of the adjacent leaf portions such that the distal ends of the adjacent leaf portions are separated by the space; and
a contact tip coupled to a free end of the beam structure opposite the body of the beam structure.