CPC H01L 21/67745 (2013.01) [B65G 47/90 (2013.01); H01L 21/67294 (2013.01); H01L 21/67333 (2013.01)] | 20 Claims |
1. An apparatus for handling die carriers, comprising:
a load port configured to load dies in a die carrier into a processing chamber, wherein the die carrier is operable to hold a plurality of dies; and
a lane changer comprising a plurality of lanes located beside the load port, coupled to the load port and configured to move at least one die in the die carrier to an input of the processing tool chamber and transfer the at least one die into the processing chamber for processing the at least one die,
wherein the load port comprises:
a table configured to receive the die carrier from an overhead hoist transport (OHT), and
a radio frequency identity (RFID) reader coupled on the table and operable to read information of the die carrier to determine whether the die carrier is correctly scheduled for processing by the processing chamber.
|