US 11,680,972 B2
Method of monitoring static charge
Shin-Ta Wu, Hsinchu (TW); and Chwen Yu, Taipei (TW)
Assigned to TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD., Hsinchu (TW)
Filed by TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD., Hsinchu (TW)
Filed on Mar. 18, 2022, as Appl. No. 17/697,926.
Application 17/697,926 is a continuation of application No. 16/883,947, filed on May 26, 2020, granted, now 11,280,823.
Claims priority of provisional application 62/926,249, filed on Oct. 25, 2019.
Prior Publication US 2022/0206053 A1, Jun. 30, 2022
This patent is subject to a terminal disclaimer.
Int. Cl. G01R 29/12 (2006.01); G01R 31/00 (2006.01)
CPC G01R 29/12 (2013.01) [G01R 31/001 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method of monitoring static charge, the method comprising:
connecting a metallic plate to a conductive tape wrapped around an outer surface of a non-conductive tube;
detecting a plurality of static charges from the metallic plate by an electrostatic field meter, wherein the conductive tape and the metallic plate are entirely disposed within a metallic box; and
adjusting a flow rate of a fluid flowing through the non-conductive tube according to the plurality of static charges detected by the electrostatic field meter.