US 11,680,338 B2
Linear lamp array for improved thermal uniformity and profile control
Brian Burrows, San Jose, CA (US); Shu-Kwan Danny Lau, Mountain View, CA (US); and Zhiyuan Ye, Cupertino, CA (US)
Assigned to APPLIED MATERIALS, INC., Santa Clara, CA (US)
Filed by APPLIED MATERIALS, INC., Santa Clara, CA (US)
Filed on Mar. 27, 2020, as Appl. No. 16/833,352.
Claims priority of provisional application 62/950,855, filed on Dec. 19, 2019.
Prior Publication US 2021/0189593 A1, Jun. 24, 2021
Int. Cl. C30B 25/10 (2006.01); G02B 7/182 (2021.01); C30B 25/08 (2006.01); C23C 16/52 (2006.01); C30B 25/16 (2006.01); C23C 16/44 (2006.01); G02B 7/18 (2021.01)
CPC C30B 25/10 (2013.01) [C23C 16/4411 (2013.01); C23C 16/52 (2013.01); C30B 25/08 (2013.01); C30B 25/16 (2013.01); G02B 7/181 (2013.01); G02B 7/182 (2013.01)] 14 Claims
OG exemplary drawing
 
1. An upper reflector assembly for use in a process chamber, comprising:
an upper reflector plate comprising:
an upper surface;
a lower surface;
a plurality of linear channels extending substantially parallel to each other across the lower surface; and air cooling slots extending from the upper surface to the lower surface, the plurality of air cooling slots comprising a plurality of first slots and a plurality of second slots, the plurality of first slots having a smaller depth than the plurality of second slots, wherein the plurality of first slots extend at an angle less than 90 degrees with respect to the upper surface of the upper reflector plate.