CPC C30B 25/10 (2013.01) [C23C 16/4411 (2013.01); C23C 16/52 (2013.01); C30B 25/08 (2013.01); C30B 25/16 (2013.01); G02B 7/181 (2013.01); G02B 7/182 (2013.01)] | 14 Claims |
1. An upper reflector assembly for use in a process chamber, comprising:
an upper reflector plate comprising:
an upper surface;
a lower surface;
a plurality of linear channels extending substantially parallel to each other across the lower surface; and air cooling slots extending from the upper surface to the lower surface, the plurality of air cooling slots comprising a plurality of first slots and a plurality of second slots, the plurality of first slots having a smaller depth than the plurality of second slots, wherein the plurality of first slots extend at an angle less than 90 degrees with respect to the upper surface of the upper reflector plate.
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