CPC C23C 16/04 (2013.01) [C23C 16/042 (2013.01); C23C 16/34 (2013.01); C23C 16/403 (2013.01); C23C 16/45525 (2013.01); C23C 16/56 (2013.01); H01L 21/76826 (2013.01); H01L 21/76843 (2013.01); H01L 21/76879 (2013.01)] | 18 Claims |
1. A method of forming a blocking layer, the method comprising exposing a substrate comprising a metallic material having a first surface and a non-metallic material having a second surface to an unsaturated hydrocarbon to selectively form a blocking layer on the first surface over the second surface, the unsaturated hydrocarbon comprising at least one linear or branched compound with a general formula R′≡R″ where R′ and R″ are independent C2-C6 groups.
|