US 11,680,313 B2
Selective deposition on non-metallic surfaces
Sang Ho Yu, Cupertino, CA (US); Lu Chen, Cupertino, CA (US); and Seshadri Ganguli, Sunnyvale, CA (US)
Assigned to APPLIED MATERIALS, INC., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on May 5, 2020, as Appl. No. 16/866,974.
Claims priority of provisional application 62/865,665, filed on Jun. 24, 2019.
Claims priority of provisional application 62/843,557, filed on May 5, 2019.
Prior Publication US 2020/0350204 A1, Nov. 5, 2020
Int. Cl. C23C 16/00 (2006.01); C23C 16/04 (2006.01); C23C 16/455 (2006.01); C23C 16/40 (2006.01); H01L 21/768 (2006.01); C23C 16/34 (2006.01); C23C 16/56 (2006.01)
CPC C23C 16/04 (2013.01) [C23C 16/042 (2013.01); C23C 16/34 (2013.01); C23C 16/403 (2013.01); C23C 16/45525 (2013.01); C23C 16/56 (2013.01); H01L 21/76826 (2013.01); H01L 21/76843 (2013.01); H01L 21/76879 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A method of forming a blocking layer, the method comprising exposing a substrate comprising a metallic material having a first surface and a non-metallic material having a second surface to an unsaturated hydrocarbon to selectively form a blocking layer on the first surface over the second surface, the unsaturated hydrocarbon comprising at least one linear or branched compound with a general formula R′≡R″ where R′ and R″ are independent C2-C6 groups.