US 11,679,543 B2
Imprinting device and imprinting method
Jee-Hoon Seo, Namyangju-si (KR); Kum-Pyo Yoo, Anseong-si (KR); and Yu-Heon Yi, Sejong (KR)
Assigned to ITED INC., Daejeon (KR)
Appl. No. 17/275,999
Filed by ITED INC., Daejeon (KR)
PCT Filed Sep. 10, 2019, PCT No. PCT/KR2019/011685
§ 371(c)(1), (2) Date Mar. 12, 2021,
PCT Pub. No. WO2020/055086, PCT Pub. Date Mar. 19, 2020.
Claims priority of application No. 10-2018-0109067 (KR), filed on Sep. 12, 2018; and application No. 10-2018-0136713 (KR), filed on Nov. 8, 2018.
Prior Publication US 2022/0032532 A1, Feb. 3, 2022
Int. Cl. B29C 59/16 (2006.01); B29C 59/02 (2006.01); B29C 35/08 (2006.01); G03F 9/00 (2006.01); B29C 59/04 (2006.01); G03F 7/00 (2006.01)
CPC B29C 59/16 (2013.01) [B29C 59/02 (2013.01); B29C 35/0805 (2013.01); B29C 59/04 (2013.01); B29C 2035/0811 (2013.01); B29C 2059/023 (2013.01); G03F 7/00 (2013.01); G03F 9/00 (2013.01)] 15 Claims
OG exemplary drawing
 
1. An imprinting apparatus comprising:
a first body part providing a support surface; and
a second body part providing a pressing surface facing the support surface and being movable in a vertical direction,
wherein the first body part comprises:
a plurality of coil cores arranged in a matrix form, each having a first through hole formed in a first direction orthogonal to the vertical direction and a second through hole formed in a second direction orthogonal to the vertical direction and the first direction;
a plurality of coil lines respectively surrounding the plurality of coil cores;
a plurality of first support bars each passing through the first through holes of a first set of the plurality of coil cores; and
a plurality of second support bars each passing through the second through holes of a second set of the plurality of coil cores.