CPC B29C 59/16 (2013.01) [B29C 59/02 (2013.01); B29C 35/0805 (2013.01); B29C 59/04 (2013.01); B29C 2035/0811 (2013.01); B29C 2059/023 (2013.01); G03F 7/00 (2013.01); G03F 9/00 (2013.01)] | 15 Claims |
1. An imprinting apparatus comprising:
a first body part providing a support surface; and
a second body part providing a pressing surface facing the support surface and being movable in a vertical direction,
wherein the first body part comprises:
a plurality of coil cores arranged in a matrix form, each having a first through hole formed in a first direction orthogonal to the vertical direction and a second through hole formed in a second direction orthogonal to the vertical direction and the first direction;
a plurality of coil lines respectively surrounding the plurality of coil cores;
a plurality of first support bars each passing through the first through holes of a first set of the plurality of coil cores; and
a plurality of second support bars each passing through the second through holes of a second set of the plurality of coil cores.
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