US 11,679,510 B2
Photoresist bottle replacement system
Oliver Yu, Hsinchu (TW); Huei-Chi Chiu, Tainan (TW); Shi-Ming Wang, Tainan (TW); Li-Jen Wu, Tainan (TW); Yu Kai Chen, Kaohsiung (TW); and Sharon Yang, Hsinchu (TW)
Assigned to Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu (TW)
Filed by Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu (TW)
Filed on Dec. 7, 2020, as Appl. No. 17/113,371.
Application 17/113,371 is a division of application No. 16/034,886, filed on Jul. 13, 2018, granted, now 10,857,676.
Prior Publication US 2021/0086368 A1, Mar. 25, 2021
Int. Cl. B25J 11/00 (2006.01); G03F 7/00 (2006.01); B25J 15/08 (2006.01); B25J 13/00 (2006.01); G05D 1/02 (2020.01)
CPC B25J 11/005 (2013.01) [B25J 13/006 (2013.01); B25J 15/08 (2013.01); G03F 7/003 (2013.01); G05D 1/0212 (2013.01); G05D 2201/0216 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method to control a vehicle to replace a photoresist (PR) bottle, comprising:
receiving a request signal based on a usage condition of the PR bottle;
relocating, via the vehicle, the PR bottle from a first location to a second location based on the request signal;
replacing, via a robotic arm on the vehicle, a cap on an other PR bottle by a socket on the PR bottle; and
transporting the other PR bottle from the second location to the first location.