CPC B25J 11/005 (2013.01) [B25J 13/006 (2013.01); B25J 15/08 (2013.01); G03F 7/003 (2013.01); G05D 1/0212 (2013.01); G05D 2201/0216 (2013.01)] | 20 Claims |
1. A method to control a vehicle to replace a photoresist (PR) bottle, comprising:
receiving a request signal based on a usage condition of the PR bottle;
relocating, via the vehicle, the PR bottle from a first location to a second location based on the request signal;
replacing, via a robotic arm on the vehicle, a cap on an other PR bottle by a socket on the PR bottle; and
transporting the other PR bottle from the second location to the first location.
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