| US 7,550,904 B2 | ||
| Thin-film piezoelectric resonator and filter circuit | ||
| Takashi Kawakubo, Yokohama (Japan); Toshihiko Nagano, Kawasaki (Japan); and Michihiko Nishigaki, Kawasaki (Japan) | ||
| Assigned to Kabushiki Kaisha Toshiba, Minato-Ku, Tokyo (Japan) | ||
| Filed on Dec. 28, 2006, as Appl. No. 11/646,684. | ||
| Claims priority of application No. 2005-379490 (JP), filed on Dec. 28, 2005. | ||
| Prior Publication US 2007/0252485 A1, Nov. 01, 2007 | ||
| Int. Cl. H01L 41/047 (2006.01); H01L 41/053 (2006.01) | ||
| U.S. Cl. 310—365 [310/349; 310/351; 310/366; 310/369] | 20 Claims |
| 1. A thin-film piezoelectric resonator, comprising:
a piezoelectric film which is formed via a space on a substrate and is supported on the substrate at only one end portion;
an upper electrode which has a plurality of electrode layers and a connection part connecting the electrode layers to each
other, each of the electrode layers being formed on the piezoelectric film, having the same width and being arranged at the
same interval as the width;
a lower electrode formed under the piezoelectric film;
a first pad which is formed on he substrate and is electrically connected to the upper electrode; and
a second pad which is formed on the substrate and is electrically connected to the lower electrode.
|