US 7,549,332 B2
Flow sensor and throttle structure
Yasuhiro Yamashita, Tsukubamirai (Japan); and Yuta Oshima, Moriya (Japan)
Assigned to SMC Kabushiki Kaisha, Tokyo (Japan)
Filed on Jun. 20, 2007, as Appl. No. 11/765,943.
Claims priority of application No. 2006-186080 (JP), filed on Jul. 05, 2006.
Prior Publication US 2008/0006085 A1, Jan. 10, 2008
Int. Cl. G01F 1/68 (2006.01)
U.S. Cl. 73—204.21 8 Claims
OG exemplary drawing
 
1. A flow sensor comprising:
a main body including a flow passage formed at least by a top wall and a bottom wall, wherein a measurement objective fluid flows through said flow passage; and
a sensor arranged along said top wall forming said flow passage so as to face said flow passage,
wherein said flow passage includes a throttle surface opposed to said sensor, and a first inclined surface formed continuously and with a constant angle on an upstream side of said throttle surface, said first inclined surface being disposed such that said flow passage, which is formed between said top wall and said first inclined surface, widens toward said upstream side, and
wherein said constant angle of said first inclined surface is formed such that an extension line of said first inclined surface, which is directed toward a downstream side, passes through a position offset toward said upstream side, as compared with a detecting section that is provided on a detection surface of said sensor.