US 7,388,258 B2
Sectional field effect devices
Ying Zhang, Yorktown Heights, N.Y. (US); Bruce B. Doris, Brewster, N.Y. (US); Thomas Safron Kanarsky, Hopewell Junction, N.Y. (US); Meikei Ieong, Wappingers Falls, N.Y. (US); and Jakub Tadeusz Kedzierski, Peekskill, N.Y. (US)
Assigned to International Business Machines Corporation, Armonk, N.Y. (US)
Filed on Dec. 10, 2003, as Appl. No. 10/732,322.
Prior Publication US 2005/0127362 A1, Jun. 16, 2005
Int. Cl. H01L 29/06 (2006.01)
U.S. Cl. 257—348  [257/618; 257/E29.052; 257/327] 12 Claims
OG exemplary drawing
 
1. A field effect transistor (FET), comprising:
a gate electrode;
a transistor body consisting of a semiconductor material, wherein said transistor body is overlaid fully by said gate electrode, wherein said transistor body comprises at least three vertically oriented sections and two or more horizontally oriented sections, wherein said vertically oriented sections are physically unattached to each other, wherein said vertically oriented sections are joined to each other by said horizontally oriented sections, wherein each of said vertically oriented sections comprises two opposing outer faces, wherein said two opposing outer faces define a first width for each of said vertically oriented sections, wherein said two opposing outer faces are engaged by said gate electrode, and wherein each of said vertically oriented sections has a first height, wherein each of said horizontally oriented sections has a first thickness, and a top face and a bottom face, and wherein said bottom face is interfacing with an insulating surface, wherein said gate electrode is engaging said top face of each of said one or more horizontally oriented sections, and wherein said first width is about twice the size of said first thickness; and
a source and a drain, wherein said source and said drain are adjoining said body in such manner that the direction of a transistor current capable of flowing though said body between said source and said drain is essentially horizontally oriented.