| US 7,547,616 B2 | ||
| Laser processing method for trench-edge-defect-free solid phase epitaxy in confined geometrics | ||
| Keith E. Fogel, Hopewell Junction, N.Y. (US); Kam-Leung Lee, Putnam Valley, N.Y. (US); Katherine L. Saenger, Ossining, N.Y. (US); Chun-Yung Sung, Poughkepsie, N.Y. (US); and Haizhou Yin, Poughkeepsie, N.Y. (US) | ||
| Assigned to International Business Machines Corporation, Armonk, N.Y. (US) | ||
| Filed on Apr. 18, 2006, as Appl. No. 11/406,122. | ||
| Application 11/406122 is a continuation in part of application No. 11/142646, filed on Jun. 01, 2005, granted, now 7,291,539. | ||
| Prior Publication US 2006/0275971 A1, Dec. 07, 2006 | ||
| Int. Cl. H01L 21/20 (2006.01) | ||
| U.S. Cl. 438—487 [438/198; 438/424; 257/E21.347] | 1 Claim |

| 1. A method for forming a hybrid orientation substrate comprising:
forming a direct-silicon-bonded (DSB) bilayer comprising an upper single-crystal Si layer having a first surface orientation
disposed on a lower single-crystal Si layer having a second surface orientation different from the first surface orientation;
selecting a plurality of first Si bilayer regions and a plurality of second Si bilayer regions, wherein said upper single-crystal
Si layer will retain its original first surface orientation in said first bilayer regions and undergo an orientation change
to a second surface orientation in said second bilayer regions;
forming a trench isolation around said first and second Si bilayer regions to produce isolation-bordered first and second
Si bilayer regions;
amorphizing said first-orientation upper single-layer crystal Si layer in said second Si bilayer regions to form localized
amorphized regions while leaving at least some of said second-orientation lower-single crystal Si layer in said second Si
bilayer regions crystalline; and
melting said localized amorphized regions and recrystallizing them to said second surface orientation using said second-orientation
lower-layer Si in said second bilayer regions as a template, wherein process conditions used to effect said melting and recrystallization
are selected to avoid any orientation change in said first bilayer regions,
wherein said first and second surface orientations of said upper and lower Si layers of said DSB bilayer are selected from
the group including (110) and (100),
wherein said DSB bilayer comprises a single-crystal Si layer having a (110) surface orientation directly bonded to an underlying
Si-on-insulator substrate layer having a (100) surface orientation,
wherein said amorphizing comprises ion implantation,
wherein said melting and recrystallizing comprises laser irradiation with one or more pulses of laser irradiation having pulse
lengths in a range from about 10 ns to about 200 ns,
wherein said laser irradiation has a wavelength in a range from about 190 to about 400 nm and a fluence in a range from about
0.1 to about 3 J/cm2, and
wherein said laser irradiation further comprises:
forming antireflection and/or absorber layer coatings on substrate surfaces to be irradiated prior to laser irradiation; and
removing said antireflection and/or absorber layer coatings after said laser irradiation.
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