US 7,547,503 B2
Photosensitive silane coupling agent, method of forming pattern, and method of fabricating device
Toshiki Ito, Kawasaki (Japan); Natsuhiko Mizutani, Tokyo (Japan); Takako Yamaguchi, Kawasaki (Japan); and Yasuhisa Inao, Tokyo (Japan)
Assigned to Canon Kabushiki Kaisha, Tokyo (Japan)
Filed on Feb. 27, 2007, as Appl. No. 11/710,901.
Claims priority of application No. 2006-070002 (JP), filed on Mar. 14, 2006.
Prior Publication US 2007/0218373 A1, Sep. 20, 2007
Int. Cl. G03F 7/20 (2006.01); G03F 7/26 (2006.01); G03F 7/36 (2006.01); C07F 7/10 (2006.01)
U.S. Cl. 430—311  [430/313; 430/315; 430/319; 430/320; 430/321; 430/322; 430/323; 430/324; 430/325; 430/326; 430/327; 430/331; 430/270.1; 430/5; 556/420; 556/422] 14 Claims
OG exemplary drawing
 
1. A photosensitive silane coupling agent having a structure represented by the following general formula (1),

OG Complex Work Unit Drawing
wherein X is a polymethylene group part of hydrogen atoms of which may be substituted with a fluorine atom or an alkyl group, a phenylene group part of hydrogen atoms of which may be substituted with a fluorine atom or an alkyl group, a naphthylene group part of hydrogen atoms of which may be substituted with a fluorine atom or an alkyl group, or a divalent group having a structure on which at least two of the polymethylene group, the phenylene group, and the naphthylene group are bonded to each other; at least one of R1, R2 and R3 is an alkoxy group or a halogen atom, the other(s) being selected from the group consisting of an alkyl group, an alkenyl group and a hydrogen atom; R4 is an alkyl group part of hydrogen atoms of which may be substituted with a fluorine atom, a phenyl group part of hydrogen atoms of which may be substituted with a fluorine atom or an alkyl group, or a naphthyl group part of hydrogen atoms of which may be substituted with a fluorine atom or an alkyl group; R5 is a hydrogen atom or an alkyl group; and R6, R7, R8 and R9 are selected from the group consisting of a nitro group, a hydrogen atom, a halogen atom, an alkyl group, and an alkyl group or an alkoxy group part or the whole of hydrogen atoms of which are substituted with a fluorine atom.