US 7,547,412 B2
Composite material, method for producing same and member using same
Masayuki Itoh, Tokyo (Japan); Tadashi Arikawa, Tokyo (Japan); Norio Hirayama, Tokyo (Japan); Yoshinari Amano, Tokyo (Japan); and Nobuyuki Saitoh, Tokyo (Japan)
Assigned to A.L.M.T. Corporation, Tokyo (Japan)
Appl. No. 10/533,087
PCT Filed Oct. 28, 2003, PCT No. PCT/JP03/13779
§ 371(c)(1), (2), (4) Date Apr. 28, 2005,
PCT Pub. No. WO2004/038049, PCT Pub. Date May 06, 2004.
Claims priority of application No. 2002-312130 (JP), filed on Oct. 28, 2002.
Prior Publication US 2005/0287387 A1, Dec. 29, 2005
Int. Cl. C22C 27/04 (2006.01); B22F 7/02 (2006.01); H01L 29/12 (2006.01); H01L 21/00 (2006.01)
U.S. Cl. 420—429  [428/548; 428/620; 438/122] 7 Claims
 
1. A composite material, which is a Mo—Cu based composite material having a Cu content of 30 to 70 weight % and which comprises a Mo—Cu composite phase and at least one copper pool phase, said at least one copper pool phase being contained in an amount of 10 to 50 weight %, wherein said at least one copper pool phase has a grain size larger than molybdenum particles forming the Mo—Cu composite phase and an average short diameter of 50 to 200 μm.