| US 7,545,510 B2 | ||
| Method of characterizing transparent thin-films using differential optical sectioning interference microscopy | ||
| Chau-Hwang Lee, Taipei County (Taiwan); and Chun-Chieh Wang, Da-Li (Taiwan) | ||
| Assigned to Academia Sinica, Nan-Kang, Taipei (Taiwan) | ||
| Filed on Apr. 25, 2007, as Appl. No. 11/789,769. | ||
| Prior Publication US 2008/0266548 A1, Oct. 30, 2008 | ||
| Int. Cl. G01B 11/02 (2006.01) | ||
| U.S. Cl. 356—503 [356/517] | 36 Claims |
| 1. A method for measuring a transparent thin-film to determine refractive indices n and thicknesses d of the thin-films, comprising:
measuring the transparent thin-film to obtain an optically sectioned axial response curve;
translating the transparent thin-film along an optical axis until intensity from the transparent thin-film is within the linear
region of the optically sectioned axial response curve;
performing at least two measurements in the linear region of the axial response curve to obtain two or more independent intensity
relationships; and
calculating a refractive index and thickness of the thin-film based on the independent intensity relationships.
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