| US 7,544,947 B2 | ||
| Cross-talk and back side shielding in a front side illuminated photo detector diode array | ||
| David B. Kerwin, Colorado Springs, Colo. (US); and Rockford Curby, Sunnyvale, Calif. (US) | ||
| Assigned to Aeroflex Colorado Springs Inc., Colorado Springs, Colo. (US) | ||
| Filed on Mar. 02, 2007, as Appl. No. 11/681,462. | ||
| Claims priority of provisional application 60/780313, filed on Mar. 08, 2006. | ||
| Prior Publication US 2007/0210259 A1, Sep. 13, 2007 | ||
| Int. Cl. G01T 1/24 (2006.01) | ||
| U.S. Cl. 250—370.11 | 19 Claims |
| 1. A method for cross-talk and back side shielding in a front side illuminated photo detector diode array, the method comprising
the steps of:
forming a matrix of scintillator crystals wherein each scintillator crystal is bonded to a photodiode wherein the matrix creates
a septa between each scintillator crystal photodiode element and wherein each scintillator crystal photodiode element possesses
a sidewall associated with each septa;
connecting a processing circuitry to each photodiode directly via a pattern of electrical contacts;
passivating each scintillator crystal photodiode element sidewall with an oxide; and
filling the septa with a material possessing an atomic number sufficient to shield the processing circuitry from X-ray radiation,
wherein the width of the material is less than the width of the septa thereby leaving an air gap between opposing sides of
the material.
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