| US 7,544,244 B2 | ||
| Method of manufacturing ceramic film and structure including ceramic film | ||
| Yukio Sakashita, Kaisei-machi (Japan); and Takamichi Fujii, Kaisei-machi (Japan) | ||
| Assigned to FUJIFILM Corporation, Tokyo (Japan) | ||
| Filed on Dec. 06, 2005, as Appl. No. 11/294,541. | ||
| Claims priority of application No. 2004-357061 (JP), filed on Dec. 09, 2004; and application No. 2005-331784 (JP), filed on Nov. 16, 2005. | ||
| Prior Publication US 2006/0125352 A1, Jun. 15, 2006 | ||
| Int. Cl. C30B 29/22 (2006.01) | ||
| U.S. Cl. 117—5 [117/7; 117/8; 117/9; 117/944] | 18 Claims |
| 1. A method of manufacturing a ceramic film by using an aerosol, said method comprising the steps of:
(a) dispersing ceramic raw material powder containing an amorphous component in a gas to generate an aerosol; and
(b) supplying the aerosol generated at step (a) into a chamber in which a substrate is placed and depositing said ceramic
raw material powder on said substrate to form a ceramic film,
wherein step (b) includes forming the ceramic film while keeping said substrate at a predetermined temperature and crystallizing
the amorphous component contained in the ceramic raw material powder on said substrate.
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