| US 7,543,501 B2 | ||
| Self-calibrating pressure sensor | ||
| Vernon Michael Cottles, Maplewood, Minn. (US); and Gregory Lawrence Wagner, Roseville, Minn. (US) | ||
| Assigned to Advanced Research Corporation, White Bear Lake, Minn. (US) | ||
| Filed on Oct. 27, 2006, as Appl. No. 11/589,326. | ||
| Claims priority of provisional application 60/730563, filed on Oct. 27, 2005. | ||
| Prior Publication US 2008/0041164 A1, Feb. 21, 2008 | ||
| Int. Cl. G01L 7/08 (2006.01) | ||
| U.S. Cl. 73—715 | 13 Claims |
| 1. A method for evaluating a pressure sensor, comprising:
inducing deflection in a diaphragm;
measuring the deflection in the diaphragm;
determining the frequency-dependent response of the diaphragm;
calculating mechanical characteristics of the diaphragm from the frequency-dependent response; and
calculating a response coefficient for the diaphragm based in part on the mechanical characteristics of the diaphragm, wherein
the response coefficient is used to evaluate the sensor.
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